七(Qi)星(Xing)华(Hua)创(Chuang)质(Zhi)量(Liang)流(Liu)量(Liang)控(Kong)制(Zhi)器(Qi)

阀(Fa)类(Lei)型(Xing)

Normally Closed or Normally Open

No Valve

Normally Closed or Normally Open

No Valve

流(Liu)量(Liang)规(Gui)格(Ge)(N₂)

(0～(?)1,2,3,5,10,20,30,50,100,200,300,500)  SCCM

(0～(?)1,2,3,5,10,20,30)                  SLM

准(Zhun)确(Que)度(Du)

±1% S.P. (≥(?)35% F.S.)

±0.35% F.S. (＜(?)35% F.S.)

±0.80% S.P. (≥(?)30% F.S.)

±0.24% F.S. (＜(?)30% F.S.)

线(Xian)性(Xing)

±0.5% F.S.

重(Zhong)复(Fu)精(Jing)度(Du)

±0.2% F.S.

响(Xiang)应(Ying)时(Shi)间(Jian)

≤(?) 0.8sec            （(?)≤(?) 0.5sec  optional）(?)

工(Gong)作(Zuo)压(Ya)差(Cha)范(Fan)围(Wei)

(0.05～(?)0.35)Mpa(≤(?)10SLM)

(0.1～(?)0.35)MPa (＞(?)10SLM)

＜(?)0.02 MPa

(0.05～(?)0.35)Mpa(≤(?)10SLM)

(0.1～(?)0.35)MPa (＞(?)10SLM)

＜(?)0.02 MPa

温(Wen)度(Du)系(Xi)数(Shu)

Zero: ≤(?)±0.02% F.S./℃(?)；(?) Span: ≤(?)±0.05% F.S./℃(?)

耐(Nai)压(Ya)

3.5MPa

漏(Lou)率(Lu)

1×(?)10^-11 Pa·(?)m³ / sec He

密(Mi)封(Feng)材(Cai)料(Liao)

Metal

工(Gong)作(Zuo)环(Huan)境(Jing)温(Wen)度(Du)

（(?)0～(?)50）(?)℃(?)

输(Shu)入(Ru)信(Xin)号(Hao)

Digital:RS485 Or DeviceNet

Analog:(0～(?)5)VDC

No

Digital:RS485 Or DeviceNet

Analog:(0～(?)5)VDC

No

输(Shu)出(Chu)信(Xin)号(Hao)

Digital:RS485 Or DeviceNet

Analog:(0～(?)5)VDC

零(Ling)漂(Piao)

＜(?)0.6%F.S. per year without autozero

电(Dian)源(Yuan)

±11～(?)±16 VDC (双(Shuang)极(Ji)) 或(Huo) +11～(?)+28 VDC (单(Dan)极(Ji))

表(Biao)面(Mian)化(Hua)学(Xue)成(Cheng)分(Fen)

Cr/Fe ratio >2.0; CrO thickness >20 Angstroms

表(Biao)面(Mian)粗(Cu)糙(Cao)度(Du)

Ra  5μ(?)inch

标(Biao)准(Zhun)接(Jie)头(Tou)形(Xing)式(Shi)

VCR1/4阳(Yang)接(Jie)头(Tou)；(?)

1.125″(?)C型(Xing)密(Mi)封(Feng)接(Jie)头(Tou)

1.125″(?)W型(Xing)密(Mi)封(Feng)接(Jie)头(Tou)

1.5″(?)B型(Xing)密(Mi)封(Feng)接(Jie)头(Tou)

1.5″(?)C型(Xing)密(Mi)封(Feng)接(Jie)头(Tou)

1.5″(?)W型(Xing)密(Mi)封(Feng)接(Jie)头(Tou)

电(Dian)源(Yuan)接(Jie)头(Tou)形(Xing)式(Shi)

D sub 9 pins male，(?)D sub 15 pins male，(?)DeviceNet male

重(Zhong)量(Liang)

1 Kg

0.8Kg

1.2Kg

1Kg